Production of solid film of SU8 photoresist by R2R coating
At a glance
- Project leader : Prof. Dr. Martin Winkler
- Co-project leader : Dr. Moshe Judelewitz
- Deputy of project leader : Jan Inauen
- Project status : completed
- Funding partner : Innosuisse
- Contact person : Martin Winkler
Description
Production of solid film of SU8 photoresist by R2R coating.