Predictive Process Tuning - PreTune
Description
This Innosuisse funded project aims to implement an innovative, predictive process control enabled by an AI-supported multiperspectivedata analysis embedded in the process Digital Twin. The outcome will significantly improve the current level of productquality and enable more ecological semiconductor production.
Key Data
Projectlead
Project partners
Hitachi Energy AG / Semiconductors
Project status
completed, 04/2021 - 11/2023
Funding partner
Innovationsprojekt / Projekt Nr. 51514.1 IP-ENG
