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Development of Abrasive Blades for Wafer Dicing by Using Ceramic Tape Casting Technology (AbraCas)

Beschreibung

Meister Abrasives AG and ZHAW intend to develop a completely new process for the production of dicing blades for wafers used in high tech industries (semiconductors, MEMS). With the new process based on ceramic tape casting technology adapted to vitreous bonded diamond abrasives limitations of the current production process will be overcome. It will lead to thinner blades with controlled and tailorable microstructure using vitreous bond systems.

Eckdaten

Projektleitung

Projektteam

Projektpartner

Meister Abrasives AG

Projektstatus

abgeschlossen, 12/2016 - 12/2019

Institut/Zentrum

Institute of Materials and Process Engineering (IMPE)

Drittmittelgeber

KTI-Projekt / Projekt Nr. 25133.2 PFNM-NM